大宗氣體中的不純物分析

Impurity Analysis in Bulk Gas

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隨著電子、半導體產業蓬勃發展，高純度氣體日益重要，已不止於過往的化工、醫療、食品等產業所需要。精確控制的 GC 能夠對大宗氣體中的微量不純物進行鑑定和定量。如果廠房的氣體來源由多條管路組成，可使用取樣管路選擇器 SLS-2020 來自動切換進樣管路，即可以單一 GC 來分析所有樣品。

分析範例：氦氣中的不純物

單次分析即可完成 He 中的不純物檢測。此範例以 PDHID 進行分析。

目標化合物 濃度
H2 100 ppb
O2 100 ppb
N2 100 ppb
CO 100 ppb
CH4 100 ppb
CO2 100 ppb

層析圖譜 (偵測器: PDHID)

GC-2014 系統也支援部分應用。

{"title":"\u4e0b\u8f09","description":"\u4e0b\u8f09\u6700\u65b0\u578b\u9304","source":"product","key":3216,"max":"30","filter_types":["brochures"],"link_title":"View other Downloads","link_url":"","pdf_links":[]} {"title":"\u61c9\u7528\u8cc7\u8a0a","source":"product","key":3216,"max":"3","filter_types":["applications","application_note","posters"],"link_title":"\u66f4\u591a\u8a73\u60c5","link_url":false,"config_list":[],"page_links":[],"column_title":"Documents"} {"title":"\u6280\u8853\u6587\u4ef6","source":"product","key":3216,"max":"3","filter_types":["technical","technical_reports","white_papers","primers"],"link_title":"\u66f4\u591a\u8a73\u60c5","link_url":"#tbaleAnchor_technical","config_list":[],"page_links":[],"column_title":"Documents"} {"title":"\u8aaa\u660e\u624b\u518a","source":"product","key":3216,"max":"3","filter_types":["manuals"],"link_title":"\u66f4\u591a\u8a73\u60c5","link_url":"#tbaleAnchor_manual","config_list":[],"page_links":[],"column_title":"Documents"}