TOC-1000e S

TOC-1000e S 線上總有機碳分析儀

適用於半導體製程之超純水線上 TOC 分析儀

在半導體製造流程中，即使是極微量的污染物，也可能對產品品質造成嚴重影響。隨著半導體元件持續朝微細化發展，最大限度的降低水中有機污染物，已成為確保高良率的關鍵要素。因此，半導體製程所使用之超純水，其水質標準也日益嚴格。尤其在先進製程中，對於尿素等難以氧化分解之有機化合物的檢測需求顯著提升，而這類物質以往採用傳統分析方式難以準確測出。TOC-1000e S 超純水線上 TOC 分析儀，係蒐集多家先進半導體製造商的實際使用回饋後所開發，專為解決上述量測挑戰而設計。

島津在 TOC 分析儀領域深耕超過 50 年，長期以來在全球建立了值得信賴的品牌形象，並奠定其在 TOC 儀器市場中的領導地位。如今，結合多年累積的技術實力與先進分析技術，島津推出 TOC-1000e S 超純水線上 TOC 分析儀，專為滿足現代半導體製程對水質監控之嚴苛需求而設計。

特色

查閱更多資訊

{"title":"\u4e0b\u8f09","description":"\u4e0b\u8f09\u6700\u65b0\u578b\u9304","source":"product","key":5817,"max":30,"filter_types":["brochures"],"link_title":"View other Downloads","link_url":"","pdf_links":[]} {"title":"\u61c9\u7528\u8cc7\u8a0a","source":"product","key":5817,"max":3,"filter_types":["applications","application_note","posters"],"link_title":"\u67e5\u95b1\u66f4\u591a\u8cc7\u8a0a","link_url":"\/products\/total-organic-carbon-analysis\/toc-analysis\/toc-1000e-s\/applications.html","config_list":[],"page_links":[],"column_title":"Documents"} {"title":"\u6280\u8853\u6587\u4ef6","source":"product","key":5817,"max":3,"filter_types":["technical","technical_reports","white_papers","primers"],"link_title":"\u67e5\u95b1\u66f4\u591a\u8cc7\u8a0a","link_url":"\/products\/total-organic-carbon-analysis\/toc-analysis\/toc-1000e-s\/applications.html#table_anchor_technical","config_list":[],"page_links":[],"column_title":"Documents"} {"title":"\u8aaa\u660e\u624b\u518a","source":"product","key":5817,"max":3,"filter_types":["manuals"],"link_title":"\u67e5\u95b1\u66f4\u591a\u8cc7\u8a0a","link_url":"\/products\/total-organic-carbon-analysis\/toc-analysis\/toc-1000e-s\/applications.html#table_anchor_manual","config_list":[],"page_links":[],"column_title":"Documents"}